Boat for vertical diffusion furnace

Details Boat for vertical diffusion furnace Boat for vertical diffusion furnace

1996-11-25

1998-01-27

Bueker, Richard

Coating apparatus

With vacuum or fluid pressure chamber

118728, C23C 1600

Patent

active

057118086

ABSTRACT:
A boat for a vertical diffusion furnace has an upper disk and a lower disk spaced parallel from each other by a predetermined distance. A pair of first bars, having a plurality of wafer holding slots, face each other along a first center plane extending along a diameter of the upper and lower disks, and connect the upper and lower disks. A pair of second bars also connect the upper and lower disks, and are positioned at a predetermined angle with respect to a second center plane orthogonal to the first center plane. The second bars have a plurality of slots corresponding to the slots of the first bars. A pair of first auxiliary bars are installed adjacent to the pair of first bars to also connect the upper and lower disks. The boat may further have a pair of second auxiliary bars for connecting the upper and lower disks at positions adjacent to the pair of second bars. Also, a pair of horizontal supporting bars connect the first auxiliary bars to the second auxiliary bars. Therefore, thermal deformation of the first bars is markedly reduced, the slip of the wafers out of the slots is prevented, and the life of the boat can be longer.

REFERENCES:
patent: 4569452 (1986-02-01), Schulke
patent: 5054418 (1991-10-01), Thompson
patent: 5507873 (1996-04-01), Ishizuka
patent: 5595604 (1997-01-01), Kobayashi

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