BMEMS-type high-sensitivity inertial sensor and...

Details BMEMS-type high-sensitivity inertial sensor and... BMEMS-type high-sensitivity inertial sensor and...

2007-09-18

2007-09-18

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514380, C073S504120, C073S504140

Reexamination Certificate

active

11189544

ABSTRACT:
The semiconductor inertial sensor is formed by a rotor element and a stator element electrostatically coupled together. The rotor element is formed by a suspended mass and by a plurality of mobile electrodes extending from the suspended mass. The stator element is formed by a plurality of fixed electrodes facing respective mobile electrodes. The suspended mass is supported by elastic suspension elements. The suspended mass has a first, larger, thickness, and the elastic suspension elements have a second thickness, smaller than the first thickness.

REFERENCES:
patent: 5016073 (1991-05-01), Elliott et al.
patent: 5987986 (1999-11-01), Wyse et al.
patent: 6155115 (2000-12-01), Ljung
patent: 6367326 (2002-04-01), Okada
patent: 6388300 (2002-05-01), Kano et al.
patent: 6679995 (2004-01-01), Banjac et al.
patent: 6736008 (2004-05-01), Kumagai et al.
patent: 6744173 (2004-06-01), Behin et al.
patent: 6923061 (2005-08-01), Tsubaki
patent: 7004026 (2006-02-01), Kano et al.
patent: 7004027 (2006-02-01), Suzuki
patent: 2003/0002938 (2003-02-01), Challoner

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