Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1986-04-30
1987-08-25
Briggs, Sr., Wilbert J.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430326, 430913, 430921, 430925, 522 31, 522 99, 522148, 5253265, 525337, 525340, 525479, G03C 1495, C08F 250, C08F 3008, C08F23008
Patent
active
046892893
ABSTRACT:
Block polymer compositions are provided which are useful as positive or negative resists utilizing aryl onium salts in combination with silicone-organic block polymers, such as polydimethylsiloxane-poly-t-butylmethacrylate block polymers. A silicone prepolymer is used in combination with certain polymerizable vinyl monomers such as t-butylmethacrylate. The silicone prepolymer has chemically combined pinacolate groups in the backbone or terminal positions which are capable of generating free-radicals upon thermolysis.
REFERENCES:
patent: 4307177 (1981-12-01), Crivello
patent: 4491628 (1985-01-01), Willson
patent: 4584356 (1986-04-01), Crivello
Briggs Sr. Wilbert J.
Davis Jr. James C.
General Electric Company
Magee Jr. James
Teoli William A.
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