Optical: systems and elements – Diffraction – From grating
Reexamination Certificate
2005-11-17
2008-11-18
Chang, Audrey Y (Department: 2872)
Optical: systems and elements
Diffraction
From grating
C359S569000, C359S566000
Reexamination Certificate
active
07453643
ABSTRACT:
A diffractive optical element has a support and a plurality of diffraction structures. The latter are applied on the support and are binary blazed by being split into substructures so that the aspect ratio of the substructures varies locally within an individual diffraction structure. One or more substructures with a large aspect ratio inside an individual diffraction structure are replaced by at least one substitute structure whose aspect ratio is less than that of the replaced substructures.
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Carl Zeiss SMT AG
Chang Audrey Y
Sughrue & Mion, PLLC
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