Blazed diffraction grating structures and method of manufacturin

Details Blazed diffraction grating structures and method of manufacturin Blazed diffraction grating structures and method of manufacturin

1981-11-30

1983-09-20

Massie, Jerome W.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156212, 156280, 156285, 156647, 1566591, 156662, 35016221, G02B 518

Patent

active

044054050

ABSTRACT:
In a diffraction grating made of a single crystalline silicon substrate, one major plane thereof is provided with a plurality of asymmetric triangular grooves, each having a wall inclined by an angle .theta. with respect to the major surface so as to satisfy an equation

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patent: 4357204 (1982-11-01), Jungkman
Muller, "Ultrafast . . . Photodiodes", International Electron Devices Meeting. Wash., D.C., (1976), pp. 420-423.
Blakely, "Method . . . Materials", Applied Physics Letters, vol. 11, No. 11, (12/67), pp. 335-336.
Tsang et al., "Preferentially . . . Silicon", Journal of Applied Physics, vol. 46, No. 5, (5/75), pp. 2163-2166.
Bassous, "Fabrication of . . . Silicon", IEEE Transaction on Electron Devices, vol. 25, No. 10, (10/78), pp. 1178-1185.
Wang et al., "Preferential . . . GaAs", Optics Letters, vol. 4, No. 3, (3/79), pp. 96-98.

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