Bit line implant

Details Bit line implant Bit line implant

2005-10-21

2008-10-07

Sarkar, Asok K (Department: 2891)

Semiconductor device manufacturing: process

Introduction of conductivity modifying dopant into...

C257SE21657, C257SE21679

Reexamination Certificate

active

07432178

ABSTRACT:
A method for performing a bit line implant is disclosed. The method includes forming a group of structures on an oxide-nitride-oxide stack of a semiconductor device. Each structure of the group of structures includes a polysilicon portion and a hard mask portion. A first structure of the group of structures is separated from a second structure of the group of structures by less than 100 nanometers. The method further includes using the first structure and the second structure to isolate a portion of the semiconductor device for the bit line implant.

REFERENCES:
patent: 5032881 (1991-07-01), Sardo et al.
patent: 5416349 (1995-05-01), Bergemont
patent: 5753557 (1998-05-01), Tseng
patent: 6171940 (2001-01-01), Huang
patent: 6576562 (2003-06-01), Ohuchi et al.
patent: 6605541 (2003-08-01), Yu
patent: 6607955 (2003-08-01), Lee
patent: 6620741 (2003-09-01), Gracias et al.
patent: 6764903 (2004-07-01), Chan et al.
patent: 6797565 (2004-09-01), Yang et al.
patent: 6803284 (2004-10-01), Hwang
patent: 6864556 (2005-03-01), You et al.
patent: 6927145 (2005-08-01), Yang et al.
patent: 7037850 (2006-05-01), Lee et al.
patent: 2002/0086547 (2002-07-01), Mui et al.
patent: 2002/0132430 (2002-09-01), Willer et al.
patent: 2003/0096503 (2003-05-01), Cho et al.
patent: 2004/0005778 (2004-01-01), Kronke et al.
patent: 2004/0058518 (2004-03-01), Fang et al.
patent: 2005/0136630 (2005-06-01), Kim
patent: 2005/0212035 (2005-09-01), Utsuno et al.
patent: 2006/0030151 (2006-02-01), Ding et al.
patent: 2006/0154477 (2006-07-01), Geng et al.
patent: 2006/0264002 (2006-11-01), Tran et al.
patent: 101 10 150 (2002-09-01), None
patent: 1 170 800 (2002-01-01), None
2002 IEEE International Solid-State Circuits Conference, Session 6, “SRAM and Non-Volatile Memories,” Feb. 4, 2004, 6 pages.
2002 IEEE International Solid-State Circuits Conference, 23 pages.

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