Binary photomask having a compensation layer

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask

Reexamination Certificate

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Reexamination Certificate

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07745068

ABSTRACT:
A binary photomask with an improved resolution and a method of manufacturing the same are provided. The binary photomask may include a substrate, a transmission-prevention pattern formed on the substrate to define a circuit pattern, and a compensation layer configured to change light transmitted through the binary photomask based on a topology of the compensation layer and arranged on the transmission-prevention layer and/or the substrate.

REFERENCES:
patent: 4537813 (1985-08-01), Kuyel
patent: 5290647 (1994-03-01), Miyazaki et al.
patent: 5298351 (1994-03-01), Bobroff et al.
patent: 5380608 (1995-01-01), Miyashita et al.
patent: 5561010 (1996-10-01), Hanyu et al.
patent: 5563009 (1996-10-01), Bae
patent: 5786113 (1998-07-01), Hashimoto et al.
patent: 6338921 (2002-01-01), Bruce et al.
patent: 2002/0122995 (2002-09-01), Mancini et al.
patent: 2003/0157415 (2003-08-01), Ziger
patent: 58-207048 (1983-12-01), None
patent: 07-134392 (1995-05-01), None
patent: 2005-055815 (2005-03-01), None
patent: 1020000001790 (2000-01-01), None
patent: 1020010002127 (2001-01-01), None
patent: 1020020052740 (2002-07-01), None
patent: 1020030056499 (2003-07-01), None
patent: 1020040008472 (2004-01-01), None
Korean Intellectual Property Office Notice to Submit Response dated Aug. 31, 2006 and English Translation.
Office Action dated Apr. 14, 2010, issued in corresponding Chinese Patent Application No. 200610129040.1.

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