Optical: systems and elements – Lens – Including a nonspherical surface
Reexamination Certificate
2004-12-17
2009-06-02
Harrington, Alicia M (Department: 2873)
Optical: systems and elements
Lens
Including a nonspherical surface
C359S649000, C355S067000
Reexamination Certificate
active
07542217
ABSTRACT:
A beam reshaping unit for an illumination system of a microlithographic projection exposure apparatus includes a first beam reshaping element having a first beam reshaping surface and a second beam reshaping element having a second beam reshaping surface which faces the first beam reshaping surface. The two beam reshaping surfaces are rotationally symmetrical with respect to an optical axis of the beam reshaping unit. At least the first beam reshaping surface has a concavely or convexly curved region.
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Deguenther Markus
Egger Rafael
Kuerz Birgit
Maul Manfred
Singer Wolfgang
Carl Zeiss SMT AG
Fish & Richardson P.C.
Harrington Alicia M
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