Beam re-registration system and method

Details Beam re-registration system and method Beam re-registration system and method

2005-09-28

2008-11-25

Nguyen, Kiet T (Department: 2881)

Radiant energy

Means to align or position an object relative to a source or...

Reexamination Certificate

active

07456414

ABSTRACT:
A beam re-registration system and method for error correction of a particle or other beam are disclosed. The beam re-registration system and method may include a particle or other beam, a stage movable in relation to the particle beam, at least two servos for controlling movement of the stage, a fixed target or grid located on the stage, and a re-registration controller adapted to control the servos. The re-registration controller may attenuate high frequency signals and amplify low frequency signals, and may be a type 2 controller which accurately corrects a ramp disturbance.

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