Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2007-04-17
2007-04-17
Nguyen, Tu T. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
Reexamination Certificate
active
11269204
ABSTRACT:
An optical inspection device includes a light source for generating a probe beam. The probe beam is focused onto a sample to create a spread of angles of incidence. After reflecting from the sample, the light is imaged onto a two dimensional array of photodetectors. Prior to reaching the detector array, the beam is passed through a rotating compensator. A processor functions to evaluate the sample by analyzing the output of the photodetectors lying along one or more azimuthal angles and at different compensator positions.
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Nguyen Tu T.
Stallman & Pollock LLP
Therma-Wave, Inc.
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