Optical: systems and elements – Lens
Reexamination Certificate
2008-03-18
2008-03-18
Mack, Ricky (Department: 2873)
Optical: systems and elements
Lens
C359S364000
Reexamination Certificate
active
07345825
ABSTRACT:
A method and apparatus for inspecting a specimen are provided. The apparatus comprises a primary illumination source, a catadioptric objective exhibiting central obscuration that directs light energy received from the primary illumination source at a substantially normal angle toward the specimen, and an optical device, such as a prism or reflective surface, positioned within the central obscuration resulting from the catadioptric objective for receiving further illumination from a secondary illumination source and diverting the further illumination to the specimen. The method comprises illuminating a surface of the specimen at a variety of angles using a primary illumination source, illuminating the surface using a secondary illumination source, the illuminating by the secondary illumination source occurring at a substantially normal angle of incidence; and imaging all reflected, scattered, and diffracted light energy received from the surface onto a detector.
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Armstrong J. Joseph
Chuang Yung-Ho
KLA-Tencor Technologies Corporation
Mack Ricky
Patel Vipin M
Smyrski Law Group, AP.C.
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