Basket for cleaning semiconductor wafers and method of cleaning

Details Basket for cleaning semiconductor wafers and method of cleaning Basket for cleaning semiconductor wafers and method of cleaning

1997-06-30

1999-06-01

Warden, Jill

Cleaning and liquid contact with solids

Processes

Work handled in bulk or groups

134 254, 134 82, 134902, B08B 1100, B08B 1102

Patent

active

059080426

ABSTRACT:
A basket for cleaning semiconductor wafers is provided which can catch semiconductor wafers or semiconductor pieces slipping off from a slicing plate so as to prevent them from dropping, and which can hold semiconductor wafers even after the wafers are separated from the slicing plate in a cleaning step.
The basket for cleaning semiconductor wafers, includes:

REFERENCES:
patent: 4771759 (1988-09-01), Zoebeli
patent: 5715806 (1998-02-01), Tonegawa et al.
patent: 5806137 (1998-09-01), Ishi et al.

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