Barrier layers and aluminum contacts

Details Barrier layers and aluminum contacts Barrier layers and aluminum contacts

1994-09-26

1996-04-02

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

437192, 20419215, 20419217, 20419222, 20419225, 148DIG3, H01L 21324, H01L 2144, C23C 1434

Patent

active

055040438

ABSTRACT:
In the manufacture of high temperature deposited aluminum contacts onto silicon substrates wherein a barrier layer of titanium nitride is used, the improvement wherein the titanium nitride contains oxygen. The improved contacts are made by depositing a titanium-containing layer onto a silicon substrate, performing a first, high temperature nitrogen anneal in vacuum to form a low resistance TiSi.sub.x contact to the silicon, and performing a second, lower temperature anneal in vacuum using a mixture of nitrogen and oxygen to stuff the titanium nitride layer. This stuffed titanium nitride layer provides an improved barrier to a subsequently deposited high temperature deposited aluminum layer.

REFERENCES:
patent: 4724060 (1988-02-01), Sakata et al.
patent: 4782380 (1988-11-01), Shankar et al.
patent: 4784973 (1988-11-01), Stevens et al.
patent: 4920073 (1990-04-01), Wei et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 5171412 (1992-12-01), Talieh et al.
patent: 5175126 (1992-12-01), Ho et al.
patent: 5232871 (1993-08-01), Ho
patent: 5236869 (1993-08-01), Takagi et al.
patent: 5312772 (1994-05-01), Yokoyama et al.
patent: 5371042 (1994-12-01), Ong
patent: 5378660 (1995-01-01), Ngan et al.
Park et al, "Al-Plaph process . . . " IEEE VMIC Conf Jun. 11, 1991 pp. 326-328.
Nulman et al, "Titanium Silicide . . . " IEEE 1991 VLSI VMIC Conf Jun. 11, 1991.
Osburn, Derwent Abs 007229892 RD 2759002.
Nicolet et al "Diffusion barriers . . . " J. Vac Sci Technol vol. 19 No. 3 Sep./Oct. 1991 pp. 786-793.

Affiliated with

Also associated with

Rating

Barrier layers and aluminum contacts does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Barrier layers and aluminum contacts, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Barrier layers and aluminum contacts will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2016214