Barrier height measuring apparatus including a conductive cantil

Details Barrier height measuring apparatus including a conductive cantil Barrier height measuring apparatus including a conductive cantil

1991-11-04

1992-12-01

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3726

Patent

active

051681595

ABSTRACT:
A barrier height measuring apparatus includes a conductive cantilever with a probe which is placed close to a specimen. The cantilever is elastically deformed by the interatomic force existing between the cantilever and specimen while the cantilever is oscillated. The displacement of the cantilever against the specimen is detected while the distance between the probe and the specimen is controlled to maintain the oscillation amplitude of the cantilever to a constant level. The apparatus includes a bias source for applying a voltage of a predetermined waveform between the specimen and the cantilever to cause a tunneling current to flow between them, and an arithmetic processor for calculating the barrier height of the surface of the specimen from the tunnel current and the displacement of the cantilever.

REFERENCES:
patent: Re33387 (1990-10-01), Binnig
patent: 4343993 (1982-08-01), Binnig et al.
patent: 5025153 (1991-06-01), Okada et al.
patent: 5047633 (1991-09-01), Finlan et al.
patent: 5066858 (1991-11-01), Elings et al.
"Scanning Tunnelling and Atomic Force Microscopy Performed With The Same Probe in One Unit", Bryant et al.
Journal of Microscopy vol. 152 Pt 3 Dec. 1988 pp. 871-875.
"Scanning Tunnelling and Atomic Force Microscopy Combined" Bryant et al. Appl. Phys. Lett. 52(26), Jun. 27, 1988.
Physical Review Letters, vol. 60, No. 12, 1988, pp. 1166-1169.

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