Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
Reexamination Certificate
2007-07-10
2007-07-10
Luu, Chuong Anh (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified configuration
C257S771000, C257S762000, C257S750000
Reexamination Certificate
active
11476971
ABSTRACT:
A method for treating a dielectric material using hydrocarbon plasma is described, which allows for thinner films of barrier material to be used to form a robust barrier.
REFERENCES:
patent: 5243222 (1993-09-01), Harper et al.
patent: 6229211 (2001-05-01), Kawanoue et al.
patent: 6677678 (2004-01-01), Biolsi et al.
patent: 7067925 (2006-06-01), Abell
Blakely , Sokoloff, Taylor & Zafman LLP
Luu Chuong Anh
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