Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
Reexamination Certificate
2006-01-24
2010-02-09
Vinh, Lan (Department: 1792)
Etching a substrate: processes
Forming or treating electrical conductor article
Forming or treating of groove or through hole
C216S022000, C216S047000, C438S053000
Reexamination Certificate
active
07658858
ABSTRACT:
A band filter using a film bulk acoustic resonator and a method of fabricating the same. The method includes the steps of forming a membrane layer on a substrate, forming a plurality of resonators on an upper surface of the membrane layer, depositing a mask layer on a lower surface of the membrane layer and patterning the mask layer to form a plurality of main windows and sub windows, and forming cavities along the main windows in the substrate and forming sub walls in the cavities in such a way that the sub walls are separated apart from the membrane layer by using the notch effect caused during a dry etching. It is possible to precisely form cavities with desired sizes even if the cavities have different sizes, to reduce the notched areas in the cavities, to reduce the total size of the filter by decreasing a distance between the cavities and to reduce the total length of wires.
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Ha Byeong-ju
Hong Seog-woo
Kim Kyu-sik
Song In-sang
Samsung Electronics Co,. Ltd.
Sughrue & Mion, PLLC
Vinh Lan
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