Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2006-05-02
2006-05-02
Rosenberger, Richard A. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
Reexamination Certificate
active
07038771
ABSTRACT:
A system for simultaneously inspecting the frontsides and backsides of semiconductor wafers for defects is disclosed. The system rotates the semiconductor wafer while the frontside and backside surfaces are generally simultaneously optically scanned for defects. Rotation is induced by providing contact between the beveled edges of the semiconductor wafer and roller bearings rotationally driven by a motor. The wafer is supported in a tilted or semi-upright orientation such that support is provided by gravity. This tilted supporting orientation permits both the frontside and the backside of the wafer to be viewed simultaneously by a frontside inspection device and a backside inspection device.
REFERENCES:
patent: 4875780 (1989-10-01), Moran et al.
patent: 5359407 (1994-10-01), Suzuki et al.
patent: 5377002 (1994-12-01), Malin et al.
patent: 5410400 (1995-04-01), Shishido et al.
patent: 5515452 (1996-05-01), Penkethman et al.
patent: 5777743 (1998-07-01), Bacchi et al.
patent: 5818576 (1998-10-01), Morishige et al.
patent: 5933230 (1999-08-01), Imaino et al.
patent: 5995226 (1999-11-01), Abe et al.
patent: 6559938 (2003-05-01), Smedt
KLA-Tencor Corporation
Rosenberger Richard A.
Smyrski Law Group, A P.C.
LandOfFree
Backside contamination inspection device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Backside contamination inspection device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Backside contamination inspection device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3647584