Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2003-02-27
2008-07-01
Whitmore, Stacy (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C324S754120, C324S763010, C700S121000, C438S011000, C438S012000
Reexamination Certificate
active
07395518
ABSTRACT:
A test vehicle comprises at least one product layer having a east one product circuit pattern on the product layer, and one or more clone layers formed over the product layer (1902). The one or more clone layers include a plurality of structures, which may include clone test vehicle circuit patterns and/or clone test vehicle vias (1902). The presence of one or more defects (1904) in the one or more clone layers (1908) is an indicator of a tendency of the product circuit pattern to impact yield of a succeeding layer to be formed over the product circuit pattern in a product (1910).
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Ciplickas Dennis J.
Hess Christopher
Koffs Steven E.
PDF Solutions, Inc.
Whitmore Stacy
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