Automatically selecting wafers for review

Details Automatically selecting wafers for review Automatically selecting wafers for review

2008-01-29

2008-01-29

Bahta, Kidest (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S121000, C702S035000, C702S181000, C716S030000, C716S030000, C438S016000

Reexamination Certificate

active

11394286

ABSTRACT:
In one embodiment, the present invention includes a method for receiving a set of inspection files each corresponding to an inspection performed on a wafer of a set of wafers, automatically analyzing the set of inspection files to select at least one inspection file corresponding to a predetermined rule set, and identifying the wafer(s) associated with the selected inspection file(s). Other embodiments are described and claimed.

REFERENCES:
patent: 6477685 (2002-11-01), Lovelace
patent: 6701259 (2004-03-01), Dor et al.
patent: 6985830 (2006-01-01), Lee et al.
patent: 7103505 (2006-09-01), Teshima et al.
patent: 2003/0120459 (2003-06-01), Lee et al.
patent: 2003/0135295 (2003-07-01), Dor et al.

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