Automatic tip approach method and apparatus for scanning probe m

Details Automatic tip approach method and apparatus for scanning probe m Automatic tip approach method and apparatus for scanning probe m

1992-06-12

1993-11-16

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 73105, H01V 3728

Patent

active

052626431

ABSTRACT:
A non-contact, step-wise method for automatically positioning a sensing probe, having a vibrating cantilever and tip, above a target surface utilizing acoustic and Van der Waals interactions respectively during an approach method. The sensing probe is lowered to a substantially optimized tip to target surface distance. The system utilizes the interaction of forces between the vibrating cantilever and target surface to automatically position the sensing probe above the target surface.

REFERENCES:
patent: 4851671 (1989-07-01), Pohl
patent: 4952857 (1990-08-01), West et al.
patent: 5025658 (1991-06-01), Elings et al.
patent: 5059793 (1991-10-01), Miyamoto
patent: 5079958 (1992-01-01), Takase et al.
patent: 5148026 (1992-09-01), Watanabe et al.

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