Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1995-03-29
1996-06-18
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250310, H01J 3700, H01J 3726
Patent
active
055280331
ABSTRACT:
A method for automatically providing a surface profile analysis of a submicron device using a microscope system typically used to measure critical dimensions of the submicron device is disclosed. The method generates a data point array that is linearly interpolated along a particular scan line measured. The system then calculates an angle for performing a rotational correlation then rotates the measurement profile from the scan line to an absolute horizontal position based on this rotational correlation angle. Next, the system separates the scan line into independent subset features having line and trench features. The number of these line and trench features are then determined in the scan line and using the data point array, the system then calculates the height, width, and angle for each subset feature in that scan line.
REFERENCES:
patent: 4525919 (1985-07-01), Fabian
patent: 4596036 (1986-06-01), Norgren et al.
patent: 4693781 (1987-09-01), Leung et al.
patent: 4702795 (1987-10-01), Douglas
patent: 4729815 (1988-03-01), Leung
patent: 4733074 (1988-03-01), Kato et al.
patent: 4900940 (1990-02-01), Nakamura
patent: 4984039 (1991-01-01), Douglas
patent: 5019522 (1991-05-01), Meyer et al.
patent: 5072266 (1991-12-01), Bulucea et al.
patent: 5182234 (1993-01-01), Meyer
patent: 5283442 (1994-02-01), Martin et al.
patent: 5298442 (1994-03-01), Bulucea et al.
patent: 5321977 (1994-06-01), Clabes et al.
patent: 5347854 (1995-09-01), Martin et al.
patent: 5400647 (1995-03-01), Elings
C. Johnson, Jr. et al., "Method for Making Dimensions in Structures Using Sidewall Image Transfer Techniques", IBM Technical Disclosure Bulletin, vol. 26, No. 9, Feb. 1984, pp. 4587-4589.
Lo Jiann-Chang
O'Leary Timothy J.
Anderson Bruce C.
Dillon Andrew J.
Hargrove Keith L.
International Business Machines - Corporation
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