Automatic shutoff valve

Details Automatic shutoff valve Automatic shutoff valve

1984-03-12

1985-10-15

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156643, 156646, 118715, 118 501, 204298, B44C 122, C03C 1500, C23C 1308

Patent

active

045472483

ABSTRACT:
A plasma reactor system is described in which modularity is enhanced through automatic shutoff valves for gas lines, enabling components to be exchanged readily. Gas lines are routed through a connector at a predetermined location for all modules. The connector comprises a valve member for each line.

REFERENCES:
patent: 4270999 (1981-06-01), Hassan et al.

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