Boots – shoes – and leggings
Patent
1986-07-14
1989-02-14
Gruber, Felix D.
Boots, shoes, and leggings
356394, 382 8, 382 34, 382 48, 358105, G06K 968, G06K 938
Patent
active
048051233
ABSTRACT:
A photomask and reticle inspection method and apparatus wherein a selected surface area of an object is inspected and a first stream of data having signal values representing the image content of each pixel thereof is generated, a second stream of data having signal values representing the intended image content of each pixel of the first stream of data is generated, corresponding portions of the first and second streams of data are stored in memory, any misalignment between the stored portions of the first and second streams of data is detected, the misaligned first and second portions of data are then aligned using shifts of an integral number of pixels and/or subpixel interpolation to correct the detected misalignment therebetween, corresponding subportions of the stored and aligned first and second portions of data are then compared to detect difference therebetween, and upon detecting a difference exceeding a predetermined threshold, the presence of a defect at a particular pixel location on the inspected object is indicated.
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Hager, Jr. James J.
Lutzker Matthew B.
Specht Donald F.
Wihl Tim S.
Young Scott A.
Dixon Joseph L.
Gruber Felix D.
KLA Instruments Corporation
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