Material or article handling – Process – Including vertically swinging load support
Reexamination Certificate
2006-07-28
2008-12-23
Fox, Charles A (Department: 3652)
Material or article handling
Process
Including vertically swinging load support
C414S684300
Reexamination Certificate
active
07467919
ABSTRACT:
A wafer carrier opener is provided. The wafer carrier opener may eliminate the use of two separate actuators by using a four-bar linkage mechanism. The wafer carrier opener includes a wafer carrier door receiver, a horizontally stationary member, and a link coupled between the wafer carrier door receiver and the horizontally stationary member so as to allow horizontal movement of the wafer carrier door receiver.
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Applied Materials Inc.
Dugan & Dugan
Fox Charles A
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