Material or article handling – Apparatus for charging a load holding or supporting element...
Patent
1998-03-06
2000-04-18
Morse, Gregory A.
Material or article handling
Apparatus for charging a load holding or supporting element...
414935, 414940, 414800, 36447801, G06F 1900
Patent
active
060507683
ABSTRACT:
According to an automatic carrier control method of a semiconductor wafer cassette transportation apparatus having high semiconductor wafer cassette transportation ability, an automatic carrier carries a semiconductor wafer cassette to an automatic carrier related inlet port of a stocker under control of a host computer. The automatic carrier confirms whether a semiconductor wafer cassette is left on the inlet port. If there is no preceding semiconductor wafer cassette, a semiconductor wafer cassette is placed on the inlet port. If there is a preceding semiconductor wafer cassette, the automatic carrier waits for a predetermined time at inlet port for the preceding semiconductor wafer cassette to be removed. When the preceding semiconductor wafer cassette is not removed at an elapse of a predetermined time, an error is issued to the automatic carrier.
REFERENCES:
patent: 4936734 (1990-06-01), Osada
patent: 4974166 (1990-11-01), Maney et al.
patent: 5570990 (1996-11-01), Bonora et al.
patent: 5751581 (1998-05-01), Tau et al.
Itami Yasushi
Iwasaki Junji
Katsube Junichi
Mitsubishi Denki & Kabushiki Kaisha
Morse Gregory A.
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