Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2005-01-25
2005-01-25
Couso, Yon J. (Department: 2611)
Image analysis
Applications
Manufacturing or product inspection
C348S125000
Reexamination Certificate
active
06847730
ABSTRACT:
A substrate handling apparatus includes a transfer arm having a substrate support. The apparatus includes at least one image acquisition sensor configured to acquire images of a substrate supported by the substrate support. In addition, the apparatus includes a controller coupled to the image acquisition sensor and configured to control the image acquisition sensor to acquire at least one image of the substrate supported on the substrate support. The controller is further configured to receive the images acquired by the image acquisition sensor and to determine an initial position of the substrate based on the acquired images. The controller is further coupled to the substrate support to control movement thereof to move the substrate to a new position based on the substrate's initial position. The apparatus also can be used to determine a substrate identification and to detect certain substrate defects either before or after processing the substrate in a thermal processing chamber. A method of positioning a substrate on a transfer arm also is disclosed.
REFERENCES:
patent: 3040773 (1962-06-01), McInerney
patent: 3524467 (1970-08-01), Worley
patent: 3717322 (1973-02-01), Bernard
patent: 3785612 (1974-01-01), Schertler
patent: 3850105 (1974-11-01), Aronstein et al.
patent: 3973665 (1976-08-01), Giammanco
patent: 3976330 (1976-08-01), Babinski et al.
patent: 4047624 (1977-09-01), Dorenbos
patent: 4052036 (1977-10-01), Schertler
patent: 4075787 (1978-02-01), Krahe
patent: 4157169 (1979-06-01), Norman
patent: 4166563 (1979-09-01), Peyraud et al.
patent: 4343455 (1982-08-01), Winkler
patent: 4381100 (1983-04-01), Schoenberg
patent: 4449885 (1984-05-01), Hertel et al.
patent: 4492301 (1985-01-01), Inaba et al.
patent: 4558984 (1985-12-01), Garrett
patent: 4562992 (1986-01-01), Sugisaki et al.
patent: 4618938 (1986-10-01), Sandland et al.
patent: 4649830 (1987-03-01), Tanaka
patent: 4682927 (1987-07-01), Southworth et al.
patent: 4709655 (1987-12-01), Van Mastrigt
patent: 4721282 (1988-01-01), Shawver et al.
patent: 4749465 (1988-06-01), Flint et al.
patent: 4775281 (1988-10-01), Prentakis
patent: 4829445 (1989-05-01), Burney
patent: 4846102 (1989-07-01), Ozias
patent: 4856641 (1989-08-01), Matsumura et al.
patent: 4857689 (1989-08-01), Lee
patent: 4870923 (1989-10-01), Sugimoto
patent: 4895107 (1990-01-01), Yano et al.
patent: 4913929 (1990-04-01), Moslehi et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 4985722 (1991-01-01), Ushijima et al.
patent: 4989543 (1991-02-01), Schmitt
patent: 5001327 (1991-03-01), Hirasawa et al.
patent: 5060354 (1991-10-01), Chizinsky
patent: 5064337 (1991-11-01), Asakawa et al.
patent: 5086729 (1992-02-01), Katagiri
patent: 5087017 (1992-02-01), Sawa et al.
patent: 5110249 (1992-05-01), Norman
patent: 5120019 (1992-06-01), Davis, Jr.
patent: 5170714 (1992-12-01), Katagiri
patent: 5178638 (1993-01-01), Kaneko et al.
patent: 5187115 (1993-02-01), Coleman
patent: 5195234 (1993-03-01), Pine et al.
patent: 5203443 (1993-04-01), Toriumi et al.
patent: 5215420 (1993-06-01), Hughes et al.
patent: 5227708 (1993-07-01), Lowrance
patent: 5252807 (1993-10-01), Chizinsky
patent: 5259883 (1993-11-01), Yamabe et al.
patent: 5274434 (1993-12-01), Morioka et al.
patent: 5275709 (1994-01-01), Anderle et al.
patent: 5288379 (1994-02-01), Namiki et al.
patent: 5292393 (1994-03-01), Maydan et al.
patent: 5330301 (1994-07-01), Brancher
patent: 5352294 (1994-10-01), White et al.
patent: 5355066 (1994-10-01), Lowrance
patent: 5377816 (1995-01-01), Deligi et al.
patent: 5379983 (1995-01-01), Geiser
patent: 5382126 (1995-01-01), Hartig et al.
patent: 5417537 (1995-05-01), Miller
patent: 5425611 (1995-06-01), Hughes et al.
patent: 5447409 (1995-09-01), Grunes et al.
patent: 5469035 (1995-11-01), Lowrance
patent: 5470784 (1995-11-01), Coleman
patent: 5474410 (1995-12-01), Ozawa et al.
patent: 5512320 (1996-04-01), Turner et al.
patent: 5535306 (1996-07-01), Stevens
patent: 5536128 (1996-07-01), Shimoyashiro et al.
patent: 5537311 (1996-07-01), Stevens
patent: 5571325 (1996-11-01), Ueyama et al.
patent: 5577707 (1996-11-01), Brida
patent: 5588827 (1996-12-01), Muka
patent: 5607009 (1997-03-01), Turner et al.
patent: 5609689 (1997-03-01), Kato et al.
patent: 5611865 (1997-03-01), White et al.
patent: 5626324 (1997-05-01), Nakamura et al.
patent: 5658114 (1997-08-01), Mahler
patent: 5674786 (1997-10-01), Turner et al.
patent: 5690744 (1997-11-01), Landau
patent: 5695564 (1997-12-01), Imahashi
patent: 5696835 (1997-12-01), Hennessey et al.
patent: 5700127 (1997-12-01), Harada et al.
patent: 5701627 (1997-12-01), Matsumura et al.
patent: 5716207 (1998-02-01), Mishina et al.
patent: 5823736 (1998-10-01), Matsumura
patent: 5846328 (1998-12-01), Aruga et al.
patent: 5879128 (1999-03-01), Tietz et al.
patent: 5881649 (1999-03-01), Hasegawa et al.
patent: 5883017 (1999-03-01), Tepman et al.
patent: 5891251 (1999-04-01), MacLeish et al.
patent: 5917601 (1999-06-01), Shimazaki et al.
patent: 5933521 (1999-08-01), Pasic
patent: 5976199 (1999-11-01), Wu et al.
patent: 6013134 (2000-01-01), Chu et al.
patent: 6215897 (2001-04-01), Beer et al.
patent: 2 114 470 (1972-09-01), None
patent: 39 41 110 (1990-06-01), None
patent: 44 14 176 (1995-10-01), None
patent: 0312046 (1989-04-01), None
patent: 0 359 525 (1990-03-01), None
patent: 0405301 (1991-01-01), None
patent: 0 441 646 (1991-08-01), None
patent: 0 608 620 (1994-08-01), None
patent: 0 608 633 (1994-08-01), None
patent: 0 684 415 (1995-11-01), None
patent: 0 684 630 (1995-11-01), None
patent: 0 756 316 (1997-01-01), None
patent: 2 363 746 (1977-08-01), None
patent: 851444 (1960-10-01), None
patent: 2 171 119 (1986-08-01), None
patent: 2 240 157 (1991-07-01), None
patent: 2 284 105 (1995-05-01), None
patent: 59-53320 (1984-03-01), None
patent: 61-117278 (1986-06-01), None
patent: 63-141342 (1988-06-01), None
patent: 03-136345 (1991-06-01), None
patent: 4-164718 (1992-06-01), None
patent: 8-274142 (1996-10-01), None
patent: 9-223727 (1997-08-01), None
patent: WO 9217621 (1992-10-01), None
patent: WO 9221144 (1992-11-01), None
patent: WO 9400868 (1994-01-01), None
patent: WO 9414185 (1994-06-01), None
patent: WO 9735241 (1997-09-01), None
patent: WO 9802911 (1998-01-01), None
PCT International Search Report dated Oct. 26, 1999.
PCT International Search Report for PCT/US 99/01487, dated May 13, 1999, 8 pages.
PCT International Search Report for PCT/US 99/11060, dated Oct. 12, 1999, 7 pages.
PCT International Search Report for PCT/IB 99/01140, dated Nov. 11, 1999, 7 pages.
PCT International Search Report for PCT/IB 99/01431, dated Jul. 28, 2000, 10 pages.
PCT International Search Report for PCT/IB 99/01307, dated Nov. 17, 1999, 6 pages.
Budo, Y. et al., “Modular Vacuum System,” IBM Technical Disclosure Bulletin, Patent Associated Literature, vol. 17, No. 8, 3 pages.
Beer Emanuel
White John M.
Applied Materials Inc.
Couso Yon J.
Moser Patterson & Sheridan LLP
LandOfFree
Automated substrate processing system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Automated substrate processing system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Automated substrate processing system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3413532