Automated repetitive array microstructure defect inspection

Details Automated repetitive array microstructure defect inspection Automated repetitive array microstructure defect inspection

2006-06-20

2006-06-20

Chawan, Sheela (Department: 2623)

Image analysis

Applications

Manufacturing or product inspection

C382S149000, C382S168000, C356S237400, C250S559220

Reexamination Certificate

active

07065239

ABSTRACT:
A method and system for defect inspection of microfabricated structures such as semiconductor wafers, masks or reticles for micro-fabrication, flat panel displays, micro-electro-mechanical (MEMs) having repetitive array regions such as memories or pixels. In one embodiment a method of inspection of microfabricated structures includes the steps of acquiring contrast data or images from the microfabricated structures, analyzing automatically the contrast data or images to find repetitive regions of the contrast data and comparing the repetitive regions of the contrast data with reference data to detect defects in the microfabricated structures. In the analyzing step, a cell-metric such as the range, or mean or other statistical or mathematical measure of the contrast data is used to find the repetitive regions. Image or contrast data acquisition can be performed with an optical, e-beam or other microscope suited for microfabricated structures.

REFERENCES:
patent: 4748335 (1988-05-01), Lindow et al.
patent: 4845558 (1989-07-01), Tsai et al.
patent: 5276498 (1994-01-01), Galbraith et al.
patent: 6360005 (2002-03-01), Aloni et al.
patent: 6376854 (2002-04-01), Shishido et al.
patent: 6388747 (2002-05-01), Nara et al.
patent: 6411377 (2002-06-01), Noguchi et al.
patent: 6614923 (2003-09-01), Shishido et al.
patent: 6674890 (2004-01-01), Maeda et al.
patent: 6759655 (2004-07-01), Nara et al.

Affiliated with

Also associated with

Rating

Automated repetitive array microstructure defect inspection does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Automated repetitive array microstructure defect inspection, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Automated repetitive array microstructure defect inspection will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3670964