Automated non-visual method of locating periodically arranged su

Details Automated non-visual method of locating periodically arranged su Automated non-visual method of locating periodically arranged su

1996-03-29

1998-05-05

Anderson, Bruce

Radiant energy

Inspection of solids or liquids by charged particles

Methods

2504911, G01N 2300, H01J 3700

Patent

active

057478023

ABSTRACT:
A method is disclosed for locating a particular small objects (down to submicron) within an array of periodically arranged like objects utilizing a scanning tool. The method includes scanning the array for generating a plurality of pulses, which correspond to these objects contained within the array. Counting the plurality of pulses in order to locate the particular object within the array.

REFERENCES:
patent: 4791302 (1988-12-01), Nozue
patent: 4885472 (1989-12-01), Young
patent: 5136169 (1992-08-01), Smith et al.

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