Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2008-08-29
2010-06-29
Pham, Hoa Q (Department: 2886)
Optics: measuring and testing
By polarized light examination
Of surface reflection
C356S399000
Reexamination Certificate
active
07746472
ABSTRACT:
Systems and methodology for orienting the tip/tilt and vertical height of samples, preferably automated, as applied in ellipsometer and the like systems.
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Goeden Christopher A.
He Ping
Johs Blaine D.
Liphardt Martin M.
Welch James D.
J.A. Woollam Co. Inc.
Pham Hoa Q
Welch James D.
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