Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1992-09-16
1994-04-05
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
250311, H01J 37295
Patent
active
053007760
ABSTRACT:
A method and an apparatus comprising a transmission electron microscope, an electron camera, a computer, and microscope control electronics. The electron camera captures an image produced by the electron microscope, the computer transforms the image into a digital diffractogram, and determines the microscope defocus and astigmatism by analyzing the diffractogram. The computer uses the determined astigmatism and defocus values to stigmate the microscope, and to set the defocus to a user-selected value. The computer also changes the direction of electron illumination to different values, and works out the true location of the optic axis of the microscope from the changes in the diffractograms recorded for the different illumination directions.
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S. J. Erasmus and K. C. A. Smith, "An Automatic Focussing and Astigmatism Correction System for the SEM and CTEM", Journal of Microscopy, vol. 127, pp. 185-199 (1982).
Anderson Bruce C.
Gatan Inc.
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