Auto focusing apparatus and method

Details Auto focusing apparatus and method Auto focusing apparatus and method

2007-04-17

2007-04-17

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S201300

Reexamination Certificate

active

10959174

ABSTRACT:
An auto focusing method and apparatus for determining a focusing evaluation value, comparing the focusing evaluation value with an acceptance level of a preset focusing evaluation value, and iteratively focusing, while widening the depth of focus, when the focusing evaluation value is lower than the acceptance level.

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English translation of German Office Action dated Jul. 12, 2006 for corresponding German Application No. 10 2004 059 664.6-51.

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