Auto focus system using twice reflection

Details Auto focus system using twice reflection Auto focus system using twice reflection

1997-10-17

1998-10-20

Mathews, A. A.

Photocopying

Projection printing and copying cameras

Focus or magnification control

355 53, 250548, 25055929, G03B 2734, G03B 2742

Patent

active

058254692

ABSTRACT:
An auto focus system incudes a light source; a beam splitting means for transmitting a first beam emitted from the light source and reflecting a second beam emitted from the light source; a reflective mirror for reflecting the first beam from the beam splitting means; a wafer mounted on a wafer stage for receiving and reflecting the first beam reflected by the reflective mirror; a total reflection means for reversing a direction of the first beam from the wafer; a detector for detecting the first beam after the first beam is reflected from the total reflection means, the wafer, the reflective mirror, and the beam splitter, and for converting the first beam into an electrical signal; and a control unit for controlling the wafer stage in accordance with the electrical signal generated from the detector.

REFERENCES:
patent: 5489966 (1996-02-01), Kawashima et al.
patent: 5684569 (1997-11-01), Sugaya et al.
patent: 5710620 (1998-01-01), Taniguchi
patent: 5760879 (1998-06-01), Shinonaga et al.

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