Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2008-01-15
2008-01-15
Lee, Diane (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C250S23700G, C250S492200, C359S569000, C378S034000
Reexamination Certificate
active
07319509
ABSTRACT:
There is provided an attenuator for attenuating electromagnetic radiation of wavelengths Unequal to a used wavelength, including a grating element having i) grating grooves that produce a grating period (p), and ii) a grating plane. The grating period (p) is least about 150 times higher than the used wavelength.
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Carl Zeiss SMT AG
Lee Diane
Liu Chia-how Michael
Ohlandt Greeley Ruggiero & Perle L.L.P.
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