Atomic scale calibration system

Details Atomic scale calibration system Atomic scale calibration system

1991-04-05

1992-10-13

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 250310, 250311, H01J 3728

Patent

active

051553597

ABSTRACT:
A scanning electron microscope is calibrated using an atomic scale microscope, such as a scanning tunneling microscope or atomic force microscope to permit accurate and precise deflection of the scanning electron beam.

REFERENCES:
patent: 4112295 (1978-09-01), Dubik et al.
patent: 4442361 (1984-04-01), Zasio et al.
patent: 4766311 (1988-08-01), Seiler et al.
patent: 4885472 (1989-12-01), Young
patent: 4948971 (1990-08-01), Vogen et al.
patent: 4977328 (1990-12-01), Van Vucht
patent: 5049745 (1991-09-01), Vogen et al.

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