Atomic probe type microscope apparatus

Details Atomic probe type microscope apparatus Atomic probe type microscope apparatus

1990-05-17

1991-09-10

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

2504431, 73105, H01J 37252

Patent

active

050476378

ABSTRACT:
A scanning tunneling microscopy apparatus includes a specimen mount on which a specimen is located, a probe for scanning the surface of the specimen, and a scanning unit for two- or three-dimensionally changing a relative positional relation between the specimen and the probe. A temperature control mechanism is located near the probe and/or the specimen to achieve temperature control. It is thus possible to eliminate an adverse effect upon the resolution of a microscope which results from a temperature variation and to make a measurement under any given temperature condition. The temperature control mechanism includes a Peltier element as a source for heating and cooling and a temperature sensor.

REFERENCES:
patent: 4747698 (1988-05-01), Wickramasinghe et al.
patent: 4841148 (1989-06-01), Lyding
Physical Review B, vol. 34, No. 2, Jul. 15, 1986; pp. 994-1005.

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