Atomic probe microscope and cantilever unit for use in the micro

Details Atomic probe microscope and cantilever unit for use in the micro Atomic probe microscope and cantilever unit for use in the micro

1991-02-26

1993-10-19

Noland, Tom

Measuring and testing

Surface and cutting edge testing

Roughness

250306, G01B 2130, G01B 1130

Patent

active

052535150

ABSTRACT:
An atomic probe microscope comprises a cantilever which includes a lever section provided with a probe, a lever attaching section for supporting the lever section, and a positioning striking section formed at the lever attaching section. A cantilever unit comprises a seat for supporting the cantilever and provided with a face against which the positioning striking section is received.

REFERENCES:
patent: 1977433 (1934-10-01), Dunning
patent: 2596494 (1952-05-01), Lynch
patent: 4341019 (1982-07-01), Possati
patent: 4943719 (1990-07-01), Akamine et al.
patent: 5047637 (1991-09-01), Toda
J. Vac. Sci. Technol. A8(1), Jan.-Feb., 1990, T. R. Albrecht et al. article entitled "Microfabrication of Integrated Scanning Tunneling Microscope", pp. 317-318.
Physical Review Letters, vol. 49, No. 1, Jul. 5, 1982 Surface Studies by Scanning Tunneling Microscopy.
Atomic Resolution Imaging of a Nonconductor by Atomic Force Microscopy, vol. 62, No. 7, Oct. 1, 1987.

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