Radiant energy – Inspection of solids or liquids by charged particles
Patent
1995-05-23
1996-11-12
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
250307, H01J 3726
Patent
active
055742785
ABSTRACT:
A method and apparatus detects surface properties of a sample surface using n atomic force microscope. The atomic force microscope includes a piezoelectric tube mounted on a rigid surface and separated into actuator and sensor segments. The sensor segments detect interatomic force information without snap-in effects common with cantilever mounts. A probe tip is mounted on the sensor section of the piezoelectric tube. The probe tip interacts with the interatomic forces of the sample surface. Supporting circuitry is used in either current feedback or force feedback modes.
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Berman Jack I.
Nguyen Kiet T.
The United States of America as represented by the Secretary of
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