Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1995-12-04
1997-11-18
Williams, Hezron E.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 578
Patent
active
056890630
ABSTRACT:
Without necessitating complicated operations, an image of a low to medium magnification and an image of a high magnification are efficiently observed by an optical microscope and by an atomic force microscope, respectively. In the atomic force microscope, an atomic force microscope probe, whose size has been reduced since a device for detecting interatomic force is provided by a piezoelectric film, piezoresistance, or the like, is disposed between an objective lens of the optical microscope and a sample to be observed or at a position of the objective lens when the objective lens and the probe are constructed so as to be interchangeable, thereby enabling the optical microscope to confirm a scanning position of the atomic force microscope.
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Fujii Toru
Fujiu Takamitsu
Hattori Tetsuo
Nomura Tatsushi
Sango Yoshinori
Larkin Daniel S.
Nikon Corporation
Williams Hezron E.
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