Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1992-05-07
1993-10-19
Raevis, Robert
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 528
Patent
active
052535169
ABSTRACT:
This invention is a dual mode atomic force microscope which has significant advantages for small samples. The major point of novelty of this device is the provision for mounting samples onto the deflection mechanism, thereby allowing the tip to be separately mounted. The invention therefore allows for increased flexibility in the design of the tip, which can improve the performance of the microscope. The main configuration and several tip designs and variations of the deflection mechanism and the sample holder are described. Also, methods for using a microscope of this type are presented. The invention primarily consists of an AFM where the sample is mounted on the cantilever arm, and the tip is mounted separately, not on the cantilever arm. The cantilever arm and sample are scanned relative to the sample either by moving the sample or by moving the tip. Dual mode operation is achieved by combining cantilever arm deflection measurement by optical means with, for example, detection of a current between the tip and sample.
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Elings Virgil B.
Gurley John A.
Digital Instruments, Inc.
Raevis Robert
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