Atomic force microscope for measuring properties of dielectric a

Details Atomic force microscope for measuring properties of dielectric a Atomic force microscope for measuring properties of dielectric a

1996-12-31

1999-02-23

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3728

Patent

active

058747346

ABSTRACT:
An atomic force microscope that has an electrically-conductive probe and tip includes a feedback control circuit for generating a substantially constant, desired Fowler-Nordheim current between the probe tip and the surface of an electrically-conductive sample having a thin dielectric or insulating film thereon. The feedback circuit maintains the desired Fowler-Nordheim current flow between the probe tip and the sample by adjusting the bias voltage applied to the probe tip, and by tracking and using the changes in the applied bias voltage to provide a measure of the thickness, electrical conductivity or other electrical property of the film.

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