Scanning-probe techniques or apparatus; applications of scanning – Monitoring the movement or position of the probe responsive... – By optical means
Reexamination Certificate
2011-07-05
2011-07-05
Berman, Jack I (Department: 2881)
Scanning-probe techniques or apparatus; applications of scanning
Monitoring the movement or position of the probe responsive...
By optical means
C850S037000, C850S038000, C310S317000, C310S316010, C331S035000, C331S1160FE, C331S156000, C331S183000
Reexamination Certificate
active
07975315
ABSTRACT:
There is provided an atomic force microscope (AFM) with increase the speed and sensitivity of detection of the resonant frequency shift in a cantilever. An AFM (1) extracts a reference signal and a phase shift signal from a detection signal from a displacement sensor of the cantilever. The reference signal is restrained from a phase change in accordance with the resonant frequency shift. The phase shift signal has a phase shifted in accordance with the resonant frequency shift. The AFM (1) determines the phase difference of the phase shift signal from the reference signal, as the resonant frequency shift. The AFM (1) may detect the phase difference between a plus-minus inversion point on the reference signal and a corresponding plus-minus inversion point on the phase shift signal. The AFM (1) may adjust phase before phase detection. The phase adjustment may move the detection point for the resonant frequency shift defined on the oscillation waveforms to the plus-minus inversion point. The detection point is set at a position where the cantilever and a sample are closest to each other on the oscillation waveform.
REFERENCES:
patent: 5966053 (1999-10-01), Durig et al.
patent: RE36488 (2000-01-01), Elings et al.
patent: 6189374 (2001-02-01), Adderton et al.
patent: 2003/0137216 (2003-07-01), de Miguel et al.
patent: 2008/0307864 (2008-12-01), Uchihashi et al.
patent: 2003-194699 (2003-07-01), None
patent: 2003-532060 (2003-10-01), None
patent: 2004-226237 (2004-08-01), None
International Search Report for PCT/JP2007/064732.
Ando Toshio
Kodera Noriyuki
Takahashi Naohisa
Uchihashi Takayuki
Berman Jack I
National University Corporation Kanazawa University
Pearne & Gordon LLP
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