Atomic force microscope

Details Atomic force microscope Atomic force microscope

1991-05-30

1993-08-24

Noland, Tom

Measuring and testing

Surface and cutting edge testing

Roughness

250306, G01B 2130

Patent

active

052378594

ABSTRACT:
This invention is an atomic force microscope having a digitally calculated feedback system which can perform force spectroscopy on a sample in order to map out the local stiffness of the sample in addition to providing the topography of the sample. It consists of a three-dimensional piezoelectric scanner, scanning either the sample or a force sensor. The force sensor is a contact type with a tip mounted on a cantilever and a sensor to detect the deflection of the lever at the tip. The signal from the sensor goes to an A-D convertor and is then processed by high-speed digital electronics to control the vertical motion of the sample or sensor. In operation, the digital electronics raise and lower the piezoelectric scanner during the scan to increase and decrease the force of the tip on the sample and to use the sensor signal to indicate the change in height of the tip to measure the which is the spring constant of the sample. This constant can be determined with nanometer spatial resolution. At the same time, the instrument can determine the topography of the sample with nanometer resolution. In an alternate embodiment, the lever is connected to a separate piezoelectric driver to vary the force on the tip. This improved AFM can also be used to periodically reset the force at which the tip contacts the sample and quickly replace the tip on the sample in the event that the tip loses contact with the surface.

REFERENCES:
patent: 4343993 (1982-08-01), Binnig et al.
patent: 4618767 (1986-10-01), Smith et al.
patent: 4724318 (1988-02-01), Binnig
patent: 4806755 (1989-02-01), Duerig et al.
patent: 4823004 (1989-04-01), Kaiser et al.
patent: 4848141 (1989-07-01), Oliver et al.
patent: 4889988 (1989-12-01), Elings et al.
patent: 4935634 (1990-06-01), Hansma et al.
patent: 4954704 (1990-09-01), Elings et al.
patent: 5003815 (1991-04-01), Martin et al.
IEEE Transactions on Magnetics; "Determination of Lubricant Film Thickness on a Particulate Disk Surface by Atomic Force Microscopy"; Apr. 25, 1989; Mate et al. (17 pages).

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