Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2006-09-08
2008-09-09
Souw, Bernard E (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S307000, C250S442110, C073S104000, C073S105000
Reexamination Certificate
active
07423264
ABSTRACT:
In one embodiment, an atomic force microscope comprises a frame, a beam coupled to the frame at a first end and a second end, a probe mounted to the beam, means for inducing relative motion between the beam and an underlying surface, and means for detecting a characteristic of the beam.
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Bevis Christopher F.
Tortonese Marco
Caven & Aghevli LLC
KLA-Tencor Technologies Corporation
Souw Bernard E
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