Atomic force microscope

Details Atomic force microscope Atomic force microscope

2008-09-09

2008-09-09

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S442110, C073S104000, C073S105000

Reexamination Certificate

active

11518320

ABSTRACT:
In one embodiment, an atomic force microscope comprises a frame, a beam coupled to the frame at a first end and a second end, a probe mounted to the beam, means for inducing relative motion between the beam and an underlying surface, and means for detecting a characteristic of the beam.

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