Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2005-03-02
2009-06-23
Berman, Jack I (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S304000, C250S307000, C250S309000, C250S492210, C250S440110
Reexamination Certificate
active
07550723
ABSTRACT:
A preliminary processing technology for a sample locally cuts out a sample part of a device to be analyzed and processes it into a needle-like projection, and a technology of realizing SAP analysis on an atomic level by ensuring stabilized ion evaporation sequentially even in the case of a sample of multilayer structure including an element layer of small evaporation electric field. The preliminary processing method for a sample used on atom probe apparatus comprises a step for cutting the desired observing part of the sample into a block using an FIB equipment, a step for transferring the sample block onto a sample substrate and fixing the sample block in place, and a step for processing the sample block fixed onto the sample substrate into a needle-point shape by FIB etching. The sample processed into a needle-point shape is shaped such that the layer direction of the multilayer structure becomes parallel to the longitudinal direction of the needle.
REFERENCES:
patent: 6875981 (2005-04-01), Nishikawa
patent: 2003/0066962 (2003-04-01), Kaito et al.
patent: 2004/0056195 (2004-03-01), Kuhlman et al.
patent: 2001208659 (2001-08-01), None
Adams & Wilks
Berman Jack I
Purinton Brooke
SII NanoTechnology Inc.
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