Measuring and testing – Sampler – sample handling – etc. – Automatic control
Patent
1997-09-26
2000-04-25
Raevis, Robert
Measuring and testing
Sampler, sample handling, etc.
Automatic control
G01N 100
Patent
active
060530588
ABSTRACT:
An atmosphere concentration monitoring system includes multiple measurement ports for collecting atmospheric gas, a port selector for switching the multiple measurement ports, a concentration measurement unit for sampling the atmospheric gas through the selected measurement port and measuring the concentration of a specific substance contained in the sampled atmospheric gas. A different set of measurement conditions are established for each of the measurement ports. The port selector and the concentration measurement unit are controlled according to the different sets of measurement conditions. A life determination device includes a flow rate determination unit for measuring a flow rate of the atmospheric gas passing through the atmosphere processing unit. A throughput of the atmosphere processing unit is determined by integrating, with respect to time, a product of the flow rate and a difference between the upstream and downstream concentrations. The life of the atmosphere processing unit is determined as a function of the throughput.
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Asai Masaya
Hayashi Toyohide
Sugimoto Hiroaki
Yokono Noriaki
Dainippon Screen Mfg. Co,. Ltd.
Raevis Robert
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