4. Measuring and testing
  5. Sampler, sample handling, etc.
  6. Automatic control

Toyohide Hayashi

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Apparatus for and method of heat treatment and substrate...

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Atmosphere concentration monitoring for substrate processing app

Measuring and testing – Sampler – sample handling – etc. – Automatic control
Patent

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Substrate processing apparatus and substrate processing method

Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
Reexamination Certificate

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Treating liquid supplying method and apparatus

Gas separation: processes – With control responsive to sensed condition – Liquid level sensed
Patent

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