Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2008-01-08
2008-01-08
Pham, Hoa Q. (Department: 2886)
Optics: measuring and testing
By polarized light examination
Of surface reflection
C356S237100
Reexamination Certificate
active
10928429
ABSTRACT:
Systems and methods for providing and enhancing electromagnetic radiation beam radial energy homogeneity and intensity vs. wavelength content, for reliably directing electromagnetic radiation emitted by a source thereof in a common direction, for achromatically reducing spot size on a sample (eg. liquid cavity containing lenses and low aberration 1:1 imaging systems modified to perform as spatial filters), and for directing different wavelengths into different detectors, in ellipsometer, polarizer or the like systems.
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Japanese Abstract 2003-307491, published Oct. 31, 2003.
He Ping
Johs Blaine D.
Liphardt Martin M.
Pfeiffer Galen L.
Welch James D.
J.A. Woollam Co. Inc.
Welch James D.
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