Aspects of producing, directing, conditioning, impinging and...

Optics: measuring and testing – By polarized light examination – Of surface reflection

Reexamination Certificate

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C356S237100

Reexamination Certificate

active

07317529

ABSTRACT:
Systems and methods for providing and enhancing electromagnetic radiation beam radial energy homogeneity and intensity vs. wavelength content, for reliably directing electromagnetic radiation emitted by a source thereof in a common direction, for achromatically reducing spot size on a sample (eg. liquid cavity containing lenses and low aberration 1:1 imaging systems modified to perform as spatial filters), and for directing different wavelengths into different detectors, in ellipsometer, polarizer or the like systems.

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Japanese Abstract 2003-307491, published Oct. 31, 2003.

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