Arrangement for stroboscopic potential measurements with an elec

Details Arrangement for stroboscopic potential measurements with an elec Arrangement for stroboscopic potential measurements with an elec

1981-07-27

1983-11-01

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

324158D, G01N 2300

Patent

active

044131810

ABSTRACT:
An electron beam testing device system for stroboscopic potential measurements of a test subject utilizes a scanning electron microscope having a beam suppression or blanking system. The blanking system deflects the electron beam across an aperture during each edge of a blanking pulse connected to control the blanking system so that two electron pulses are generated for each blanking pulse. A detector produces a signal responsive to a secondary electron beam resulting from impact of each of the electron pulses on the test subject. A signal processing unit with an associated gate circuit all preferably incorporated in a boxcar integrator processes only one of the two electron pulses associated with each blanking pulse. A phase control preferably within the boxcar integrator is connected to control the gate circuit and a blanking pulse generator for producing the blanking pulse.

REFERENCES:
patent: 4063091 (1977-12-01), Gee
patent: 4220853 (1980-09-01), Feuerbaum et al.
patent: 4220854 (1980-09-01), Feuerbaum
patent: 4223220 (1980-09-01), Feuerbaum
J. Phys. E: Sci. Instrum., vol. 11, 1978, Article entitled "A Sampling Scanning Electron Microscope", at pp. 229-233, Gopinathan et al., and also article entitled Beam Chopper for Subnanosecond Pulses in Scanning Electron Microscopy, at pp. 529-532, Feuerbaum et al.

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